2 November 2001

Note of 0.5u process AMI C5 process

Different version of magic and technology file are needed.

Run:

magic_subm –T SCN3ME_SUBM.30

You may need to run “unlimit” if you run out of memory.

The major design rule difference is that poly spacing is 3 lambda.

Please save your original magic files. Make a copy in a new directory and then try the 0.5u magic to see if there are errors. Please don’t mix these files with the older 1.6u version. Although the process is considered to be 0.5u, the lambda values is rounded up to 0.3u, so that it seems to be a 0.6u process.

Additions/changes for 0.5u process:

All of these files are to be installed soon and are relative to

/usr/site/cad a copy exists in /home/cavallar/cad_2001

lib/scmos30.prm - Changed resistance values to use AMI-specific numbers.

*Note* - Use this instead of scmos100.prm on the irsim command line.

lib/mpla/p-AMI30.mag - New template for mpla. Use platool_subm.

lib/pplot/pat.scmos.[bw|color] - BW/Color definitions to make pplot compatible

with 0.5u process.

lib/magic/sys/mos.7bit.dstyle5 - Needed slight changes for making contacts

visible in 0.5u.

lib/magic/scmos/pad_06/Pad*.mag - Pads and constructed pad frame for 0.5u.

lib/magic/scmos/palette.mag - Color and layer pallete including 0.5u process.

bin/platool_subm - platool script that uses the correct mpla template.

Additional Questions:

Eric Furbish efurbish@rice.edu used the 0.5u process last year and has helped to prepare

these notes.